06/26/2024
Leak tests are essential in semiconductor factories and in the manufacturing of solar cells and flat panel displays. Identifying the smallest leaks with helium leak detection is important for maintaining the required purity, avoiding defects and for product quality. To enhance the UL family of leak testers, INFICON has launched the three intelligent additions SMART-Spray, I·BOOST and SPRAY-Check. The specialist in measurement technology, sensor technology and control software ensures easier handling, faster response times, shorter test cycles and more reliable measurement results.
INFICON’s SMART-Spray helium spray gun
INFICON is offering a new helium spray gun with the SMART-Spray. The hose-bound handling of large helium cylinders and the error-prone adjustment of the spray volume are a thing of the past with SMART-Spray. "The handy device, which is designed for over 1,000 sprays per helium filling, replaces a remote control and combines its functions with those of a manual helium spray gun," said Product Manager Markus Schwambera. Equipped with an illuminated color display, it makes leak detection on complex semiconductor systems with many test points and potential leaks easier.
With the signal processing filter I·BOOST software update, INFICON accelerates the leak rate signal. This shortens the response and test times, especially for the UL3000 Fab and UL6000 Fab series, because the test points can be sprayed at shorter intervals. "The bottom line is that this results in a time saving up to 50% in leak detection in all measuring ranges," said Schwambera. "Users who purchase the license achieve faster and more precise measurement results for different chamber volumes.” The benefits of I·BOOST are also particularly effective in complex semiconductor systems.
With the SPRAY-Check, INFICON offers an easy-to-install test leak. "The tool is based on quartz windows that are only permeable to light gases such as helium and hydrogen. This increases safety and extends the functionality of leak detection,” said Schwambera. SPRAY-Check allows the measurement set-up and test method to be checked in the relevant leak rate range. It can also be attached directly to the system to carry out dead-time checks.
SMART-Spray, I·BOOST and SPRAY-Check are suitable for all mobile INFICON helium leak detectors of the UL family, whereby I·BOOST is limited to the latest generation of UL devices (UL3000 Fab/UL6000 Fab series). The UL6000 Fab is a powerful device on the market for larger test volumes in modern semiconductor factories and coating systems with very large chamber volumes. It offers the fastest response times and shortest test times in all measuring ranges. Its compact design makes it easy to maneuver even in tight spaces.
About INFICON
INFICON is a leading provider of innovative instrumentation, critical sensor technologies and Smart Manufacturing/Industry 4.0 software solutions that enhance productivity and quality of tools, processes and complete factories. INFICON is headquartered in Switzerland and has world-class manufacturing facilities in Europe, the United States and China, as well as subsidiaries in China, Denmark, Finland, France, Germany, India, Italy, Japan, Liechtenstein, Malaysia, Mexico, Singapore, South Korea, Sweden, Switzerland, Taiwan, the United Kingdom and the United States. INFICON registered shares (IFCN) are listed on SIX Swiss Exchange. For more information, visit https://www.inficon.com.
